MEMS Capacitive Accelerometers


Date
21 Oct 2010

Abstract

Accelerometers detect various form of mechanical motion including inertial force, tilt, vibration or shock and are therefore used in a variety of railway applications (high speed train tilt control, bogie monitoring and diagnostics, safety, maintenance).

There are various types of accelerometers using piezoelectric, piezoresistive or capacitive sensing element. However these different sensing technologies do not offer the same level of sensor performances.

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